Picosun delivers powder MEMS technology platform to Fraunhofer ISIT | News

ESPOO, Finland, February 17, 2022 / PRNewswire / – The Fraunhofer Institute of Silicon Technology (ISIT) used the PICOSUN® P-300B ALD system as the MEMS powder technology platform.

Fraunhofer ISIT PowderMEMS is a new innovative technology for creating three-dimensional microstructures from a variety of plate-level materials. The technology is based on the binding of powder particles of microns in size to the cavity by atomic layer deposition (ALD). It has many advantages over other manufacturing technologies as it allows the use of much lower process temperatures compared to the traditional sintering process. Bonded porous structures are thermally and chemically stable, which allows them to carry out extensive post-processing in a clean room.

“The technology can be used for a variety of applications, such as microelectronics, MEMS sensors, MEMS drives and microfluidics. For example, it allows the integration of porous and magnetic 3D microstructures at the plate level,” he explains. Dr. Bjorn Swinggroup leader at Fraunhofer ISIT.

“We were looking for a solution to evenly coat the powder with a high surface area located in the trenches. The Picosun solution is ideal for this need as we are also looking for technology expansion opportunities. We are particularly pleased that this tool has a hot wall reactor, versatile predecessor sources and easy maintenance, ”it is claimed Doctor Thomas LisekChief Research Fellow Fraunhofer ISIT.

“We are delighted that this new technology is coming to life and all the opportunities it will bring. I am particularly impressed with the potential applications of Fraunhofer ISIT PowderMEMS as they are extremely diverse. I look forward to continuing to work closely with Fraunhofer ISIT to bring technology to industry “He says Doctor Christoph HosbachCEO of Picosun Europe GmbH.

Additional information:

Doctor Christoph HosbachCEO of Picosun Europe GmbH

Tel. +49 1522 449 49 11

Email: info@picosun.com

Web: www.picosun.com

Picosun provides the most advanced solutions for the application of thin-film coatings ALD (atomic layer) for the world’s industries. Picosun ALD solutions allow you to make a technological leap into the future with turnkey production processes and unrivaled pioneering experience in this field – starting with the invention of the technology itself. Today, PICOSUN® ALD equipment is used daily in many leading industries around the world. Picasso is in Mr. Finlandwith subsidiaries in Germany, USA, Singapore, Japan, South Korea, China mainland and Taiwanoffices in India and Franceas well as a worldwide sales and support network. Visit www.picosun.com

Fraunhofer ISIT in Itzehoe is one of Europe state-of-the-art research institutions for microelectronics and microsystems technologies. At the center of the institute are clean rooms large enough not only for research but also for the production of developed microchips on an industrial scale. In close collaboration with industry partners, 160 ISIT scientists are developing power electronics and microsystem components with fine moving structures for sensor technology and drives, including the necessary packaging technology. www.isit.fraunhofer.de

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SOURCE Picosun Oy

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